Logic and assumptions used in building a simulation model of an Automated Material Handling System (AMHS) for an eight inch Wafer FAB are presented in this paper. The ExtendSim model built for this project includes the ability to make changes to the area stocker layout, number of area stockers, number of loops, number of cars, and/or the number of Lot moves. This model is used to determine if the Area Stockers can handle the quantities of Lots per hour required by From-To-Table "customer" requirements.
Simulation Model Analysis of AMHS with Area Elevators for an 8 inch Wafer FAB
- Source: Conference on Modeling and Analysis of Semiconductor Manufacturing
- Date: 2002
